Slim actuator (stroke, rotation, vacuum)
Slim pick-and-place actuator with Ezi-SERVO II CC-Link: stroke (Z), rotation (θ) and vacuum through the hollow shaft in one unit, integrated directly into CC-Link networks – for chip mounters, dispensers and inspection devices with limited installation space.
Mechanics
The hollow-shaft motor and ball screw spline are coupled directly – no belts or pulleys, making the unit particularly slim. Repeatability is ±0.01 mm on the Z-axis and ±0.1° on the θ-axis. Sizes 28 and 42 mm with 50 mm stroke and up to 1.5 kg payload; the hollow shaft accommodates Ø6 mm vacuum tubes. A home sensor set (NPN or PNP) is factory-mounted. The actuator is designed for vertical mounting; radial loads are not permitted.
Control
The Ezi-SERVO operates in closed loop: no lost steps, no hunting at standstill, no gain tuning required. The drives join CC-Link networks as nodes (remote device station). Alternatively, up to 256 stored positions can be triggered via digital I/Os. An additional RS-485 port is available for parameter setting from a PC.
Actuator VZR-42
Drive EzS2-CL-42
Encoder B (20,000 P/R)